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Integrated Chemical Microsensor Systems in CMOS Technology (Microtechnology and MEMS) Integrated Chemical Microsensor Systems in CMOS Technology (Microtechnology and MEMS) by Andreas Hierlemann

Integrated Chemical Microsensor Systems in CMOS Technology (Microtechnology and MEMS)

by Andreas Hierlemann


ISBN 13: 9783540237822

Format: Hardcover (229 pages)
Publisher: Springer
Published: 21 Feb 2005

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CMOS Hotplate Chemical Microsensors (Microtechnology and MEMS) CMOS Hotplate Chemical Microsensors (Microtechnology and MEMS) by Markus Graf,Diego Barrettino,Henry P. Baltes,Andreas Hierlemann

CMOS Hotplate Chemical Microsensors (Microtechnology and MEMS)

by Markus Graf,Diego Barrettino,Henry P. Baltes,Andreas Hierlemann


ISBN 13: 9783540695615

Format: Hardcover (125 pages)
Publisher: Springer
Published: 03 Apr 2007

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